Edwards Dry PumpEdwards’ iXH645H dry pump has been optimized for MOCVD processes used in LED manufacturing, as well as for compound semiconductor manufacturing using III-V materials in gate stacks. The pump delivers high gas flow capability and is able to operate continuously at the high loads required for the latest-generation LED manufacturing tools. Both LED and compound semiconductor manufacturing processes typically use high flows of light hydrogen and highly corrosive ammonia gasses. The pump has been optimized to support these requirements with hydrogen pumping performance and a corrosion-resistant design, including a patented nitrogen purge barrier to protect the pump seals. The high-temperature capabilities of the pump help prevent condensation of the phosphorous compounds that may be present. Its advanced oil lubrication and seal technology eliminate periodic maintenance requirements, while its thermal and motor design prevent overheating, motor overloads, or zones of limited operation. Its temperature control system ensures the pump is ready for process within approximately 30 minutes of startup. www.edwardsvacuum.com