Entegris”s Torrento ATE 15nm chemical filter (pictured here) provides retention of particles as small as 15nm at the specified retention flowrate rating. Built on the first and only 15nm PTFE membrane on the market, the Torrento filter features low pressure drop and proprietary, non-dewetting surface modification for stable, long-life performance. It is a good fit for use with aggressive SPM, SC1, and SC2 chemistries. Entegris’s new Impact filter is a 5nm filter for point-of-use photochemical applications, offering tight retention of hard particles and gels. The Impact filter features an asymmetric membrane that delivers a combination of improved flowrates and lower pressure drop to handle the most advanced photoresists and other coatings. The 5nm asymmetric membrane technology is also available for bulk photochemical applications in Entegris”s Microgard family of filters.