Swagelok”sCR-288 concentration monitor is designed to address a criticalrequirement in the semiconductor industry for improved monitoring andcontrol of liquid chemicals employed in device manufacturing. Installedin the process stream or at point-of-use where chemicals are deliveredor blended, the technology delivers real-time, highly accuratemeasurements of the concentration and temperature of process fluids.The monitor provides in-line analysis of liquid chemical concentration.Designed specifically for the semiconductor industry, it is physicallysmall, easy to install, and serviceable in the field. Proprietarysoftware enables the technician to calibrate the unit for chemicalmixtures used in semiconductor laboratory or manufacturing processes,including etching, wafer cleaning, and chemical mechanicalplanarization (CMP). The software provides a graphical readout that thetechnician may customize for data logging over time. Concentrationaccuracy is +/- 0.1 percent. Concentration accuracy is based onmeasuring ethylene glycol and water at 20 PSIG (1.3 bar), 76.1 F to78.8 F (24.5 C to 26 C), and calibration range of zero to 100 percent.Temperature accuracy is 0.1 C. Temperature resolution is 0.01 C.Response time is 1.2 sec.
Courtesy of Emerson
Courtesy of Emerson
