IST SensorInnovative Sensor Technology’s Hygrochip Series digital humidity sensors combine the advantages of a precise capacitive humidity sensor element with the high integration density and functionality of an ASIC. The integrated signal processor receives the measured data and directly delivers the physical parameters of relative humidity and temperature over an I2C compatible interface. Both nonlinearity and temperature dependence are corrected “OnChip” by computation, to ensure accuracy (+/- 1.8 percent rH, +/- 0.2 C) for a range of applications. Compared with monolithic solutions, the new digital humidity modules offer notable performance advantages. The P14 humidity sensor, featuring a high performance polymer, is characterized by high chemical resistance, ability to recover after dew formation, and long-term stability in critical application areas with high humidity. –