Brooks Instrument will unveil its new XacTorr CMX0 capacitance manometer, as well as the new EtherCAT capabilities of its GF40/80 mass flow controller (pictured here) at Intersolar North America, July 10-12 in San Francisco. The Brooks XacTorr CMX family of capacitance manometers are designed to provide solar and semiconductor manufacturers with highly stable and repeatable measurements for pressure-sensitive processes. The product offers full-scale ranges from 1,000 Torr to 100 mTorr, as well as 0.15 percent of reading accuracy. With its patented Mark IV sensor, the Brooks XacTorr lasts up to three times as long in aggressive processes compared to other capacitance manometers. The rapid recovery feature allows the sensor to recover from large changes in pressure faster than other vacuum gauges on the market, significantly decreasing downtime. The XacTorr CMX0 offers an unheated option with the same full-scale ranges and an accuracy of 0.25 percent of reading. It also allows drop-in replacement and unique diagnostic features for preventative maintenance such as tracking remaining zero adjustment range to allow scheduled maintenance.
The GF40/80 is a highly modular, user-programmable mass flow controller designed for solar and thin-film processes. Using MultiFlo technology, the GF40/80 combines exceptional flow repeatability, sub 1/sec flow control response time, the most comprehensive gas and flow range programmability and industry leading, long-term reliability. The GF40/80 is now equipped with EtherCAT. The EtherCAT protocol makes it easier to network flow control and other devices for advanced process control and diagnostic capabilities.