Brooks Instrument (, a manufacturer of flow measurement, control devices and level gauges, acquired certain assets of the Instrumentation division of Celerity (, a provider of gas and liquid delivery solutions for the semiconductor, solar and electronics industries.

Specifically, Brooks acquired Celerity’s Allen, Texas and Irvine, Calif. operations, as well as other worldwide sales and service locations. The acquisition includes Celerity’s GF Series thermal mass flow controller, designed to precisely measure, monitor and control ultra-high purity process gas chemistry in semiconductor device and solar cell manufacturing processes; as well as other specialty products serving vacuum and pressure measurement markets.

Financial terms of the transaction were not disclosed.